Micro&Nano Fabrication Unit

‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ ‌‌ 

Dear Micro-Nano Fabrication Unit Users, I’m writing to you for the first time as the new Head of the Unit, having joined alongside Dr. Eran Lipp, our new Chief Engineer, in October 2023. This past period has been a time of significant change, with both leadership transitions and the ongoing situation in Israel. I’m incredibly impressed by the resilience and dedication of our team. Throughout these challenges, the Micro-Nano Fabrication Unit has continued to be a thriving hub of research, fabrication, and training activity.  This dedication and “can-do” spirit are precisely what I hope to continue fostering. We have a talented team who are passionate about supporting your micro- and nano-fabrication needs. This newsletter, which we plan to publish annually, aims at keeping you informed about new capabilities, upcoming projects, and relevant resources within the Unit. It is designed for all users, from experienced researchers to those just starting their micro-nano journey. We encourage you to reach out with any questions you might have. Remember, whatever your design challenges, our experienced team is here to help you translate your ideas into reality. We look forward to collaborating with you and supporting your innovative research and development endeavours. Sincerely, Prof. Guy Bartal Head, Micro-Nano Fabrication Unit         We’re happy to announce the arrival of some new equipment in the cleanroom! E-Beam & Thermal Evaporator VINCI This powerful new evaporator has been recently installed and is available for users now. It enables thermal and e-gun deposition with an added ion gun for in-situ pre-cleaning, option for co-deposition and substrate annealing up to 900C. Interested users please contact our team.   Heidelberg DWL66+ Laser Writer The upgraded laser writer was installed with resolution down to 0.5um. Please contact the team for more info.   Bruker’s Dektak XT™ Stylus Profiler This new profilometer boasts improved performance with better measurement repeatability, faster results, and a user-friendly interface. It’s accessible to all cleanroom users, and training is available through the MNFU team.         VCSELs made at Technion   Vertical cavity surface emitting lasers are the most abundant among all types of lasers and are the dominant component in numerous applications. Technion undertook to develop three types of VCVSELs within a MAGNET project, in collaboration with NVIDIA and SCD. In all three sub-projects, Technion achieved world class results, often surpassing state of the art commercial VCSELs. Two VCSEL categories were developed in collaboration with NVIDIA. The first is lasers at 795 nm to be used in quantum sensors such as miniature atomic clocks, magnetometers, and gyroscopes. These VCSELs require stringent parameters all of which were achieved with superb results. The second type are ultra-fast VCSELs operating at 1060 nm to be used in future data centres. These lasers achieved record speeds of 38 Gbit/s. The third type are high power VCSEL arrays operating at 976 nm, developed in collaboration with SCD. In this category, Technion worked on two array designs. One using mode coupling of well-placed VCSELs within an array, and the second using topological locking of the VCSELs within the array. In this part of the project, Technion demonstrated record array size and powers.   The large success of the project is a result of academic leadership, first and foremost by Prof. Meir Orenstein as well as by Prof. Gadi Eisenstein and Prof. Moti Segev. These project leaders collaborated with many experts and students including Dr. Lior Gal, Dr. Beso Mikhelashvili, Amnon Willinger, Guy Seri and Inbal Rapaport. However, the largest contribution to the success is the superb work of the MNFU staff including: Yana Milyutin, Dr. Orna Ternyak, Amit Shacham, Valentina Korchnoy, Arkadi Gavrilov and Aya Cohen. The MNFU staff took on the VCSEL development project which is the largest and most difficult and complex project ever done at Technion, and achieved results which are well above what is expected from an academic fabrication facility.         Assembly services   Here at the MNFU we offer a wide variety of assembly and packaging services including – 25 μm Gold Ball & Wedge wire bonding – 25 μm Aluminum Wedge wire bonding – Conductive and non-conductive adhesives – AlN, Duroid, Si, GaAs, InP and other components – Micro-mechanical (MEMS) components assembly – Basic manual soldering assembly       Spring semester2024 Student Course 044239 Be aware that some equipment will be unavailable during course hours: Mondays 8:30 – 12:30 Tuesdays 13:30 – 17:30 Wednesday 13:30 – 17:30 Safety First! Short courses and yearly refreshment training are mandatory. If you haven’t attended yet, contact Tatiana immediately to avoid restricted cleanroom access.   Virtual tour: The cleanroom virtual tour is now available at : https://vr.360spaces.co.il/en/tour/9ta96dba4   New Safety Test Coming Soon: We’re developing a new safety test to be sent to all users. Passing this test will be required to extend cleanroom access as part of the refreshment session. A PDF with essential safety rules will also be provided.   Together, we can create a safe and productive cleanroom environment.